Vertical Surrounding Gate Transistor for High Density and Low Voltage Operation in DRAM

Wenqi Wang, Sang Don Yi, Fu Li,Qingchen Cao,Jiangliu Shi,Bok-Moon Kang, Meichen Jin, Chang Liu,Zhenhua Wu,Guilei Wang,Chao Zhao

IEEE Access（2024）

引用 0|浏览11

关键词

Vertical surrounding gate transistor (VSGT),dynamic random-access memory (DRAM),parasitic capacitance,optical proximity correction (OPC),area scaling,power saving

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