Wide And Fast Mode-Hop Free Mems Tunable Ecdl Concept And Realization In The Nir And Mir Spectral Regime

External cavity diode lasers (ECDLs) are a well-established laboratory tool due to their excellent emission properties. However, if the ECDLs are used outside the laboratory, they have limitations in terms of tuning speed and robustness. For overcoming these limitations, we developed a new micro-electro-mechanical system (MEMS) based ECDL cavity concept. The 1D MEMS actuator defines the angle of incidence at the diffraction grating as well as the cavity length of the ECDL. Due to the high resonance frequency of the MEMS actuator in the kHz range, the switching speed of the ECDL emission wavelength is drastically reduced. Furthermore, the MEMS actuator minimizes the sensitivity to external disturbance which opens a path to handheld wide mode-hop free tunable ECDLs in the near future. Therefore we have also optimized our curved waveguide concept based on GaSb for the ECDL design, whereby a wavelength range from NIR to the MIR range can be better covered. These features qualify the new developed MEMS tunable ECDL for the high demands of the high resolution multi-species molecular spectroscopy. Application examples of the MEMS based ECDL and the curved gain chips will be provided.