3.5 A 34µW 32MHz RC Oscillator with ±530ppm Inaccuracy from −40°C to 85°C and 80ppm/V Supply Sensitivity Enabled by Pulse-Density Modulated Resistors

Amr Khashaba,Junheng Zhu,Mostafa Ahmed,Nilanjan Pal,Pavan Kumar Hanumolu

2020 IEEE International Solid- State Circuits Conference - (ISSCC)（2020）

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摘要

This paper presents a method for precise and robust cancellation of the resistor TC across process using a parallel combination of two switched -resistors [5] that are digitally -controlled by pulse -density modulated sequences. Using the proposed composite resistor and trimming at only two temperature -insertion points, a prototype FLL-based 32MHz oscillator fabricated in a 65nm CMOS process achieves an inaccuracy of ±530ppm (8.4ppmPC), 8OppmN voltage sensitivity, and 2.5ppm Allan deviation with an excellent power efficiency of 1μW/MHz.

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关键词

Allan deviation,CMOS process,prototype FLL-based oscillator,temperature-insertion points,pulse-density modulated sequences,switched-resistors,resistor TC,robust cancellation,supply sensitivity,RC oscillator,composite resistor,pulse-density modulated resistors,power 34.0 muW,frequency 32.0 MHz,temperature -40.0 degC to 85.0 degC,size 65 nm

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