Force sensor fabrication by AgNWs film using 532 nm pulses laser

This current study investigated the effects of laser direct writing (LDW) on the capacitance force sensor of a poly (3,4-ethylenedioxythiophene): poly(styrene sulfonic acid) film mixer with silver nanowire thin films by using a 532-nm laser system. The technique was combined with various scanning speeds (i.e., 800, 1000, and 1200 mm s(-1)) to investigate the effectiveness of the force sensor. During interdigitated electrode fabrication, the laser fluence and laser pulse repetition frequency were fixed at 5.42 J/cm(2) and 40 kHz, respectively. Nonloading force and various loading force states were used to test the function of the electrode under different LDW conditions. A best correlation coefficient of approximately 0.88 confirmed a linear functional dependence between the square of the pattern width and capacitance under the micromachining speed of 1000 mm s(-1). Moreover, in the nonloading force state, the capacitance value increased with the increase in the electrode pattern width under a micromachining speed of 800 mm s(-1). Regarding the loading force status, the capacitance increased when the loading force increased from 18 to 90 g. When the interdigitated pattern line width was 500 mu m and electrode micromachining speed was 800 mm s(-1), the maximum capacitance value was 71.5 pF under a loading force of 90 g.