Comprehensive optical losses investigation of VLSI Silicon optomechanical ring resonator sensors

Cavity optomechanics devices are leading edge candidates for a new generation of sensors both in the quantum and classical realms. Several single devices have been demonstrated in numerous labs, however large-scale integration capability necessary for industrial deployment is still an issue. In this paper, we present very-large-scale integrated (VLSI) optomechanical sensors fabricated from standard 200 mm Silicon-On-Insulator (SOI) wafers. Optical properties over a statistically significant sample size have been systematically investigated and show an excellent modeling to experiment agreement, a coupling parameter dispersion of 7% and a manufacturing yield larger than 98%. Controlled versatile sensors, such as these, could easily be embedded in any chip where mass or force sensing is needed.