GIDL Analysis of Novel 4F2 VCT Architecture Using TCAD Simulations
2025 Conference of Science and Technology of Integrated Circuits (CSTIC)(2025)
关键词
TCAD Simulation,Gate-induced Drain Leakage,Epitaxial,Channel Length,Doping Concentration,Channel Thickness,Transistor Channel,Secondary Channel,Energy Band,Work Function,Tunneling Current,Low Work Function,Gate Structure,High Doping Concentration,Subthreshold Slope
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