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Single-Etch Silicon Nitride Grating Couplers for Multiband Applications in Quantum and Fiber Communications

William Fraser, Radovan Korček,Daniel Benedikovič,Cameron Horvath,Shurui Wang,Martin Vachon,Rubin Ma, Jens H. Schmid,Pavel Cheben, Winnie N. Ye

IEEE Journal of Selected Topics in Quantum Electronics（2025）

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关键词
grating coupler,silicon nitride,silicon photonics,subwavelength metamaterials
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