Mechanical Strength Assessment of Ruthenium Nano-Interconnects with Airgaps Using Wedge Indentation
2025 26th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)（2025）
Key words
mechanical strength,Ruthenium nanointerconnects,fracture energy,airgaps,wedge indentation
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