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0.32 Mhz Frequency Mismatch of Micro-Shell Resonator Gyroscope Without Tuning Electrodes Achieved by Ultra-Precision Mechanical Trimming

Sheng Yu, Xianfeng Huang, Jiangkun Sun, Peng Xie,Kun Lu,Yongmeng Zhang,Xuezhong Wu,Dingbang Xiao

Microsystems & nanoengineering（2025）

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