Correction: Unprecedented Developed Composite Polishing System to Achieve Atomic Surface Integrating Rough and Fine Polishing Using a Novel Hyper-Conjugated Pad Through Controlling the Temperature of a Proposed Green Slurry
Advanced Composites and Hybrid Materials（2025）
关键词
Splitting,Hyper-conjugated,Composite polishing system,Chemical mechanical polishing,Atomic surface
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