Shadow-Assisted Sidewall Emission for Achieving Submicron Linewidth Light Source by Using Normal UV Photolithography

Junlong Li, Yanmin Guo, Kun Wang, Wei Huang, Hao Su,Wenhao Li,Xiongtu Zhou,Yongai Zhang,Tailiang Guo,Chaoxing Wu

Nano-Micro Letters（2025）

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关键词

Submicron light source,Quantum dot,Photoluminescence,Photolithography,Shadow-assisted sidewall emission

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