Planar and Modular Silicon Package Suitable for Future Large-Format 1.9 THz Heterodyne Arrays
2024 IEEE Microwaves, Antennas, and Propagation Conference (MAPCON)（2024）
Key words
Terahertz,heterodyne,focal plane arrays,spectroscopy,DRIE,silicon micromachined
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined