Multiwindow Implantation Method in Vertical Hall Devices for High Sensitivity

Guiqiang Zheng, Nannan Cheng, Yichen Li, Jiawei Dou, Qingyin Zhong,Jie Ma, Lanlan Yang, Xiaofeng Sun, Dejin Wang,Sen Zhang,Yongjia Li,Long Zhang,Siyang Liu,Weifeng Sun

IEEE Transactions on Electron Devices（2025）

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关键词

Bipolar–CMOS–DMOS (BCD),current-related sensitivity (S I ),Hall chip,multiwindow implantation (MWI),vertical Hall device (VHD)

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