Low-Temperature Atomic Layer Deposition of GeTe/Sb2Te3 Superlattice with High-Quality Van Der Waals Structure
PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS（2025）
关键词
2D materials growth,GeTe/Sb2Te(3) superlattices,high-textured crystal growth,low-temperature atomic layer deposition,phase-change memory
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