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Effect of Bias Voltages on the Microstructures and Superconductive Properties of Nb Films Deposited Via HiPIMS

Haichang Duan,Yuchen Yang, Jiawen Kan, Ping He, Jin Dai,Pei Zhang,Tianmu Xin,Yongsheng Ma,Hongjuan Zheng

RADIATION DETECTION TECHNOLOGY AND METHODS（2025）

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关键词
HiPIMS,Microstructure,Nb film,SRF cavity,Superconductive properties
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