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Development of a Large Aperture Fast Steering Mirror Based on Piezoelectric Differential Driving Mechanism

Jiahui Zhou,Chengliang Pan,Jian Chen, Baogang Chen, Renwen Liu,Haojie Xia

2024 18th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)(2024)

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Key words
Large aperture fast steering mirror,Piezoelectric drive,Flexible hinge,Finite element simulation
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