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Modeling and Analysis of Vibration Coupling in Differential Common-Based MEMS Resonators

Jing Zhang, Zhuo Yang, Tianhao Wu, Zhichao Yao,Chen Lin,Yan Su

Micromachines（2025）

Cited 0|Views4
Key words
differential common-based MEMS resonators (DCMR),vibration coupling,silicon resonant accelerometer (SRA),coupling stiffness
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