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Studies on the Doping Mechanism and Strain State Effect of AlGaN/GaN Double Channel Heterostructures with Si-doped Barrier

Baiqi Wang,Yachao Zhang,Shengrui Xu, Yixin Yao,Wenjun Liu, Chenglin Du, Xiaolong Cai,Sheng Wu,Haijun Liu,Yu Zhang, Xue Tang,Jincheng Zhang,Yue Hao

Materials Science in Semiconductor Processing（2025）

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