Reconfigurable ScAlN Piezoelectric Micromachined Ultrasonic Transducer Arrays for Range Finding

Wenling Shang, Danrui Wang,Bin Miao, Shutao Yao, Guifeng Ta, Haojie Liu, Jinyan Tao, Xiaonan Liu,Xiangyong Zhao,Jiadong Li

Micromachines（2025）

Cited 0|Views5

Key words

piezoelectric micromachined ultrasonic transducers (PMUTs),array,range finding,scandium-doped AlN (ScAlN)

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