High Efficiency Fabrication of Si Microlenses by Applying In-Situ Laser and Ultrasonic Vibration Hybrid Diamond Cutting

Jianguo Zhang, Xinhuan Li, Shanyi Ma, Yujiang Lu, Haoxia Tian,Junfeng Xiao,Jianfeng Xu

Precision Engineering（2025）

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Ultrasonic elliptical vibration cutting,In-situ laser assisted cutting,Diamond cutting,Hard and brittle material,Micro structures

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