Near-Infrared Spectral MEMS Gas Sensor for Multi-Component Food Gas Detection

Xiaojian Yan, Yao Tan, Yi Wang, Gongdai Chen, Weigao Xia, Gang Zhou, Hongliang Luo, Hao Liu,Tianxun Gong,Xiaosheng Zhang

Micromachines（2025）

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Key words

MEMS,micro-electromechanical systems,near-infrared spectroscopy,gas sensor

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