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Stable Stitching: Impact and Mitigation of Environment on Metal-Oxide Resist Imaging

Patricia P. Marin San Roman,Sonia Castellanos,Gijsbert Rispens,Rik Hoefnagels, Herman Nicolai,Lidia van Lent-Protasova, Jelte Van der Valk,Peter De Schepper,Amrit K. Narasimhan

Journal of Micro/Nanopatterning, Materials, and Metrology（2025）

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