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Ultra-Low Temperature Ozone Annealing for Decreasing Sub-Threshold Swing of Oxide Thin Film Transistors

Qi-Zhen Chen,Jia-Hao Yan, Wan-Qiang Fu,Ming-Jie Zhao, Yun-Shao Cho,Chien-Jung Huang,Shui-Yang Lien

crossref(2025)

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