Study of Vth Degradation Mechanism in FeFET with TiN/Al2O3/HfO2/Al2O3/Hf0.5Zr0.5O2/SiOx/Si Structure
2024 IEEE 17th International Conference on Solid-State & Integrated Circuit Technology (ICSICT)（2024）
Key words
FeFET,charge trapping/de-trapping,gate leakage,trap
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined