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Optical Performance of Functionally Gradient TiN Multilayered Thin Films Deposited Through Magnetron Sputtering

Sayan Atta, Shreyas Karthikeya, Sitaram Dash,Arun Tom Mathew,Uttamchand NarendraKumar

Physica B Condensed Matter（2025）

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Key words
Ti/TiN,Cylindrical magnetron sputtering,Optical properties,UV–Vis-NiR spectrophotometer,Spectroscopic Ellipsometry,Functionally gradient coatings
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