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Improved Threshold Voltage Stability for GaN P-Channel Field Effect Transistors by Hydrogen Plasma Treatment

Huixin Yue, Guohao Yu,Bohan Guo,Yu Li,Ang Li,Shaoqian Lu,Jiaan Zhou,Runxian Xing,An Yang, Chunfeng Hao, Jinxia Jiang, Yuxiang Zhang,Yong Cai,Zhongming Zeng,Baoshun Zhang

JOURNAL OF PHYSICS D-APPLIED PHYSICS（2025）

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Key words
GaN,p-FET,hydrogen plasma treatment,threshold voltage stability
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