Laser Differential Confocal Freeform Surface Shape Measurement Based on Monitoring and Compensation of Translational Motion Error
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT（2025）
关键词
Optical surface waves,Shape measurement,Measurement by laser beam,Extraterrestrial measurements,Measurement uncertainty,Surface emitting lasers,Accuracy,Surface topography,Optical variables measurement,Monitoring,Freeform surface shape,laser differential confocal,motion error compensation,normal tracking measurement
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