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Optimization of Fabrication Process for Ga2O3-based Heterojunction Solar-Blind UV Photodetector by Magnetron Sputtering

Ke Tang,Wei Zhang,Haofei Huang, Zhichao Qian,Keyun Gu,Zilong Zhang,Masaya Toda,Lei Zhang, Zun Liu, Qiuguo Qi, Ruinan Zhang,Jian Huang,Linjun Wang

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING（2025）

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关键词
Ga2O3,Heterojunction,Magnetron sputtering,Solar-blind UV photodetector
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