Spectral Confocal Micro Displacement Measurement Based on Temporal-Spatial Analysis of Spot Profiles
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT（2025）
Key words
Wavelength measurement,Weight measurement,Accuracy,Semiconductor device measurement,Displacement measurement,Interference,Biomedical measurement,Length measurement,Position measurement,Optical variables measurement,Central wavelength analysis,monochromatic light,spectral confocal measurement,weighted centroid method
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