Progress in Inverse Lithography Technology

Futian Wang,Juan Wei, Cuixiang Wang,Jiang Miao, Yu Mu, Chunlong Yu, Ruihua Liu, Fu Li, Jingjing Fan, Jinlai Liu, Jingkang Qin, Enqiang Tian,Song Sun, Chong Wang, Xiaonan Liu, Hao Yang,Di Liang,Binbin Yan,Liang Li,Qingchen Cao,Jiangliu Shi

LASER & OPTOELECTRONICS PROGRESS（2024）

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Key words

inverse lithography technology,computational lithography,lithography,mask

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