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(Invited) Metrology along the Gate-All-Around Logic Roadmap: from Nanosheet to Complementary Field-Effect Transistors

Janusz Bogdanowicz,Mohamed Saib,Matteo Beggiato,Gian Lorusso, Vincent Brissonneau,Emmanuel Dupuy,Roger Loo,Yosuke Shimura, Anjani Akula,Hiroaki Arimura,Pallavi Puttarame Gowda,BT Chan, Daisy Zhou,Hans Mertens,Lucas P. B. Lima,Naoto Horiguchi,Serge Biesemans,Joey Hung,Igor Turovets, Sun Wei,Philipp Hoenicke,Richard Ciesielski,Anne-Laure Charley,Philippe Leray

ECS Meeting Abstracts（2024）

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