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Selective Epitaxial Growth of SiGe(:B) for Advanced P-Type Fd-SOI

Justine Lespiaux,Joël Kanyandekwe,Tanguy Marion, Lazhar Saidi, Valérie Lapras,Alice Bond, Fabien Bringuier,Jérôme Richy, Alan Thouvard, Tim Biet,Emmanuel Nolot, Ludovic Couture,Laurent Brunet,Philippe Rodriguez, Eva Dos Reis,Nicolas Gauthier, Adrien Blot-Saby,Jean-Michel Hartmann

ECS Meeting Abstracts（2024）

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