Study on Supercritical Fluid Technique for Application in Nonvolatile Resistive Random Access Memory (RRAM) Device Using SBT Ferroelectric Thin Films
2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)（2024）
Key words
RRAM,SCCO2,I-V,p-E,MIM
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