5.8-Ghz Coupled Shear SAW Resonator Based on Z-Cut LiNbO3/SiO2/Si Substrate
2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)（2024）
关键词
MEMS,Coupled Shear Mode,Lithium Niobate,Surface Acoustic Wave (SAW),Electromechanical Coupling Coefficient
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