High Frequency LLSAW Filters with Higher Order Modes Elimination Based on LiNbO3/SiO2/Sapphire Substrate
2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)（2024）
Key words
LiNbO3,longitudinal leaky surface acoustic wave,acoustic filter,spurious mode suppression,Sapphire
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