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High Sensitivity Lateral Hall Device in Silicon on Insulator (SOI) Platform

Guiqiang Zheng, Qingyin Zhong,Jie Ma, Yichen Li, Nannan Cheng,Nailong He,Sen Zhang,Yongjia Li,Long Zhang,Siyang Liu,Weifeng Sun

IEEE SENSORS（2024）

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Key words
Hall sensor,Lateral Hall devices (LHD),Silicon on insulator (SOI),Bipolar-CMOS-DMOS (BCD),Deep trench,Short-circuit effect
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