SiC Micro-Hot Wires for Flow Measurement in Harsh Environments

Sylvain Kern,Aurélien Mazzamurro,Cécile Ghouila-Houri, Thomas Arnoult,Romain Viard, Djamila Hourlier, Laure Tandt, Philippe Pernod,Marc Portail,Abdelkrim Talbi

IEEE SENSORS（2024）

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Key words

Microsystems,silicon carbide,thermal sensors,anemometry,harsh environments

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