$\Textit{c}$ -Axis Oriented HZO on Flat Amorphous TiN Achieving High Uniformity, Breakdown Field, Final 2P $_{\text{r}}$ , and Endurance

Zefu Zhao, Yu-Tsung Liao,Yu-Rui Chen,Yun-Wen Chen,Wan-Hsuan Hsieh,Jer-Fu Wang, Yu-An Chen, Hao-Yi Lu, Wei-Teng Hsu, Dai-Ying Lee,Ming-Hsiu Lee,C. W. Liu

IEEE TRANSACTIONS ON ELECTRON DEVICES（2025）

引用 0|浏览0

关键词

Breakdown voltage,chemical-mechanical polishing (CMP),endurance,flat ferroelectric (FE),metal-FE-metal (MFM),oxygen vacancy,remanent polarization,superlattice

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要