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The Effect of Substrate Bias Voltage on the Properties of Al-doped ZnO Films Deposited by Magnetron Sputtering

A. I. Ievtushenko,V. A. Karpyna,O. F. Kolomys,S. V. Mamykin, P. M. Lytvyn,O. I. Bykov,A. A. Korchovyi,S. P. Starik, V. V. Bilorusets, V. I. Popenko,V. V. Strelchuk,V. A. Baturin,O. Y. Karpenko

SEMICONDUCTOR PHYSICS QUANTUM ELECTRONICS & OPTOELECTRONICS（2024）

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关键词
ZnO:Al films,magnetron sputtering,substrate bias voltage,transmittance,XRD,electrical conductivity.
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