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Experimental Evaluation of the Response of AlGaN/GaN UV Photodetectors with Square and Hexagonal Nanohole Arrays

IEEE SENSORS JOURNAL(2025)

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Key words
Wide band gap semiconductors,Aluminum gallium nitride,Nanoscale devices,Photodetectors,Performance evaluation,Sensors,Phonons,Optical surface waves,Etching,Epitaxial growth,AlGaN/GaN,HEMTs,nanoholes,photodetectors (PDs)
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