Intelligent MEMS Thermal Mass Flowmeter Based on Modified Sage-Husa Adaptive Robust-Strong Tracking Kalman Filtering

Xinxin Yan, Lei Zhao,Chen Tang,Jie Zou,Wanlei Gao,Jiawen Jian,Qinghui Jin,Xin Zhang

IEEE SENSORS JOURNAL（2025）

引用 0|浏览15

关键词

Sensors,Micromechanical devices,Flowmeters,Kalman filters,Accuracy,Velocity measurement,Biomedical measurement,Temperature measurement,Measurement uncertainty,Sensitivity,Gas flow,microelectromechanical system (MEMS),Sage-Husa adaptive Kalman filter (SHAKF),strong-tracking filter,thermal mass flowmeter (TMF)

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