SRAM with Oxide Semiconductor Pull-Down Transistors on the Backside Enabling Full-Node PPA Improvement

Tao Chou, Tzu-Yun Liu,Li-Kai Wang,Tsai-Yu Chung,Ching-Wang Yao,Hsin-Cheng Lin,C. W. Liu

IEEE ELECTRON DEVICE LETTERS（2025）

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关键词

Stacked transistors,monolithic 3D,6T SRAM,nanosheets,oxide semiconductor,BEOL-compatible transistors,Stacked transistors,monolithic 3D,6T SRAM,nanosheets,oxide semiconductor,BEOL-compatible transistors

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