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A General Optimization Framework for Nanofabrication Using Shadow Sphere Lithography: A Case Study on Chiral Nanohole Arrays

Xinyi Chen,Mingyu Cheng, Jinglan Zhang, Yuxia Wang,Chong Chen, Qian Zhang, Yongxin Zhang, Xingguo Wang,Gang Zhang,Bin Ai

JOURNAL OF COLLOID AND INTERFACE SCIENCE(2025)

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Key words
Shadow sphere lithography,Chiral metamaterials,Nanostructures,Plasmonics,Machine learning
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