Exploring GAA-Nanosheet, Forksheet and GAA-Forksheet Architectures: a TCAD-DTCO Study at 90 Nm & 120 Nm Cell Height
IEEE Journal of the Electron Devices Society（2024）
Key words
DTCO,Nanosheet,Forksheet,Buried Power Rail,Backside power delivery,PPA,process integration,design rules
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