Beyond Performance of Learning Control Subject to Uncertainties and Noise: A Frequency-Domain Approach Applied to Wafer Stages

Fazhi Song, Ning Cui, Shuaiqi Chen,Kai Zhang,Yang Liu,Xinkai Chen,Jiubin Tan

IEEE-CAA JOURNAL OF AUTOMATICA SINICA（2025）

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关键词

Noise,Uncertainty,Data models,Semiconductor device modeling,Convergence,Accuracy,Stochastic processes,Adaptation models,Integrated circuit modeling,Feedforward systems,Extended state observer,learning control,model uncertainties,motion control,stochastic noise

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