Addressing Mobility Overestimation in Short-Channel IGZO TFTs Using the Gated Van Der Pauw Method

Woo-Seok Lee, Jaeho Lee, Amarja Katware, Noh-Hwal Park,Jiyoung Kim,Rino Choi,Jeong-Hwan Lee

ACS APPLIED MATERIALS & INTERFACES（2024）

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indium-gallium-zinc-oxide thin-film transistors,contact resistance,gated van der Pauw,sheetresistance,field-effect mobility

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