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Improved Thermal Dissipation in a MoS2 Field-Effect Transistor by Hybrid High-k Dielectric Layers

Jian Huang,Yifan Li, Xiaotong Yu,Zexin Liu,Fanfan Wang, Yue,Rong Zhang,Ruiwen Dai,Kai Yang,Heng Liu,Qingyang Fan, Donghui Hong,Qiang Chen,Zhiqiang Wang,Yuan Gao,Guoqing Xin

ACS APPLIED MATERIALS & INTERFACES（2024）

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Key words
thermal dissipation,thermal boundary conductance,MoS2 field-effect transistor,high-k dielectric layer,Al2O3/HfO2,temperature profile
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