Impacts of Substrate and Growth Temperature on the Deposition and Etching of C-Axis Oriented AlN Piezoelectric Thin Films Shaocheng Wu, Wenjiao Pei, Rongbin Xu,Yibo Zeng,Jianfang Xu,Baoping Zhang,Daquan Yucrossref（2024）引用 0|浏览3AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
