Low Threshold Voltage and High Phase Transition Performance of Ito/Vo₂:W Composite Films Deposited by Reactive Magnetron Sputtering

Yuxuan Lei, Jiahua Qi,Le Li, Xia Tian, Jingjia Chen, Liurui Ye, Peizhou Lu, Qihang Luo,Yi Liu,Aihua Zhong,Xingmin Cai,Fan Ye,Dongping Zhang

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING（2025）

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Key words

Vanadium dioxide,Phase transition,Threshold voltage

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