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P-type Extended Drain MOSFET Integration on Thin SOI

A. Boutayeb,D. Golanski,F. Guyader,S. Joblot, F. Baron, P. Chantraine, Y. Escarabajal,O. Gourhant,A. Inard, C. Jenny, J. Duval,S. Delmedico,C. Theodorou,F. Ponthenier,J. Lacord

2024 50TH IEEE EUROPEAN SOLID-STATE ELECTRONICS RESEARCH CONFERENCE, ESSERC 2024（2024）

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Key words
eDMOS,SOI,characterization,TCAD,leakage
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